Effect of DC bias on properties of C: SiOX film prepared by HMDSO

The C: SiOX film prepared by HMDSO has excellent corrosion resistance. The influence of HMDSO/O2 ratio on the composition, corrosion resistance and hardness of the film was discussed in the last part. In the whole coating process, 

HiPIMS self-organizing discharge high-resolution spectral imaging

Due to the constraint of magnetic field and the ultra-high power discharge, the high-power pulsed magnetron sputtering technology (HiPIMS) has the unstable phenomenon of glow flicker due to the partial discharge enhancement during the discharge process.

Sputtering characteristics of HiPIMS reaction

Sputtering rate of HiPIMS target

Corrosion resistant films prepared by HMDSO precursor system

Brief introduction of vacuum coating method for inner wall of tube

Bipolar HiPIMS regulates the growth of high density copper films

Effect of HiPIMS pulse waveform on glow discharge characteristics