3

High power impulse

    HiPIMS设备:高能脉冲弧PVD设备及脉冲复合PVD设备

High power impulse :

Feature: 

1.High power ion source achieving uniformed, larger ion deposition distribution over a larger area at high ion current density.  

2.Mixed sputtering of different metals, alloys and oxides 

3.Film layers are uniform

4.Automatic controlling system

5.Highly anti-corrsion capability

HiPIMS设备:高能脉冲弧PVD设备及脉冲复合PVD设备

11 xiugai.jpg

12  修改.jpg

13 xiugau.jpg